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About Liga
LIGA stands for Lithographie Galvanoformung Abformung (Lithographic electroforming Molding). The process was developed at Karlsruhe Labratory in Germany. Using this process, it is possible to expose a resist with a thickness of 500um to several mm depending on the wavelength of the X-rays used.

The synchotron radiation is used to expose a resist structure through an X-ray mask. This resin resist structure is developed and etched away (negative). The Ni-Mn alloy is electroformed to create a positive cast. This cast is polished to a desired thickness. The resin is then ashed, leaving the Ni-Mn cast of desired thickness. This cast is used to create a mold resin. This mold is cured and used to separate the Ni-Mn cast from the Titanium substrate. The mold resin is then ashed to leave the finished parts.

The drawbacks to this process include the 2.5 dimensional constraint, but the benefits of highly accurate complex formations must be recognized as required in the market of high density contact pin probes.

For transducer applications, this process allows tighter control and uniformity for rod dimensions, and high aspect ratio compared to conventional "dice and fill" method of construction.

Example of Resist Structure
(Negative)


Click for larger image

Example of electroformed "part" (positive)

Click for larger image


Click for larger image

Probe Pins
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Ultrasonic Transducer
Please feel free to email transducer@sumitomo.com for additional information regarding specifications, quotations, availability, and brochures.

 
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